Download Glow Discharge Processes: Sputtering and Plasma Etching PDF EPUB
Author: Brian Chapman
Pages: 432
Size: 3.672,90 Kb
Publication Date: 2009
Category: Solid-State Physics
Develops detailed knowledge of the deposition and etching of components by sputtering discharge, and of etching of components by chemically dynamic discharge. Subjects range between voltage, distributions encountered in plasma etching systems to plasma-electron interactions that donate to sustaining the discharge. Treats glow discharge at a number of levels from fundamental phenomena to commercial applications–practical techniques diligently linked to fundamentals.