Download Practical MEMS: Design of microsystems, accelerometers, gyroscopes, RF MEMS, optical MEMS, and microfluidic systems PDF EPUB
Author: Author
Pages: 496
Size: 3.789,34 Kb
Publication Date: March 17,2009
Category: Nanotechnology
Practical MEMS targets analyzing the operational principles of microsystems. For instance, the sound and power overall performance of piezoresistive and capacitive accelerometers is definitely analyzed at length. The reserve emphasizes the look and evaluation through over 100 calculated examples covering all areas of MEMS style.
Focus on design. This publication targets the microdevice operation. Initial, the physical operation concepts are protected. Second, the look equations are derived and exemplified. Practical MEMS is definitely an ideal companion to MEMS fabrication textbooks. For instance, the optical MEMS is normally analyzed in the context of bar code scanner, projection shows, and optical cross connect specs.
MEMS economics and market evaluation. The salient top features of the reserve include:
Tutorial strategy. Mechanical, resistive (thermal and 1/f-sound), and circuit noise evaluation is covered. A complete chapter is specialized in yield and cost evaluation of microfabricated products. Different MEMS applications are in comparison to commercial style requirements.
Quantitative performance analysis. The crucial overall performance parameters for the provided application are determined and analyzed.
Application specs. In addition, the marketplace economics for emerging applications such as for example RF MEMS is talked about.