Foundations of MEMS (2nd Edition)

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For classes in Micro-Electro-Mechanical Systems (MEMS) used by advanced undergraduate learners, beginning graduate college students, and experts.

Foundations of MEMS can be an entry-level text made to systematically teach the specifics of MEMS to an interdisciplinary target audience. An abundance of examples and complications solidify students’ knowledge of abstract concepts and offer ample possibilities for practicing vital thinking. Liu discusses styles, materials, and fabrication problems linked to the MEMS field by using concepts from both electric and mechanical engineering domains and by incorporating evolving microfabrication technology — all in a time-effective and methodical way.

See also

• Solid State Electronic Devices (7th Edition)
• Brooks: PCB Currents _c1 (Prentice Hall Modern Semiconductor Design Series'sub Series: Prentice Hall Signal Integrity Library)
• Electronics Technology Fundamentals: Electron Flow Version (3rd Edition)