Fundamentals of Microfabrication: The Science of Miniaturization, Second Edition

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Pages: 752

Size: 3.648,17 Kb

Publication Date: March 13,2002

Category: Nanotechnology



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MEMS technology and applications have become at a significant pace, while structural measurements have become smaller and smaller sized, reaching down also to the molecular level. With this movement attended brand-new types of applications and fast advances in the technology and techniques had a need to fabricate the significantly miniature gadgets that are actually changing the world.

New in the next Edition
  • Revised chapters that reflect the countless recent improvements in the field
  • Up-to-date and improved discussions of topics which includes DNA arrays, microfluidics, micromolding methods, and nanotechnology
  • In-depth protection of bio-MEMs, RF-MEMs, high-temperatures, and optical MEMs.

    Fundamentals of Microfabrication, Second Edition gives unique, in-depth insurance coverage of the technology of miniaturization, its strategies, and materials. Renowned writer Marc Madou provides added exercise units to each chapter, hence answering the necessity for a textbook in this field. From the basics of lithography through bonding and product packaging to quantum structures and molecular engineering, it offers the background, equipment, and directions you should confidently choose fabrication strategies and components for a specific miniaturization issue.

    A bestseller in its initial edition, Fundamentals of Microfabrication, Second Edition displays the countless developments in methods, components, and applications which have emerged lately.
  • A lot more links to the net
  • Problem models in each chapter


  • See also